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Bragg-Angle Diffraction in Slant Gratings Fabricated by Single-Beam Interference Lithography
Slant Grating Single-Beam Interference Lithography Bragg-Angle Diffraction
2013/1/30
A single-beam interference-lithography scheme is demonstrated for the fabrication of large-area slant gratings, which requires exposure of the photoresist thin film spin-coated on a glass plate with p...