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Nano-Processing of Transparent Materials by Focussed Femtosecond Laser Pulses for the Development of Novel Bio-Microchip
Femtosecond laser Silica glass Chemical etching
2009/6/8
We report fabrication of three-dimensional (3-D) microchannels inside transparent materials. The 3-D microfabrication was achieved by two steps. First, femtosecond pulses were focussed into the transp...